Mechanical equipment / Machine Tools｜Factory automation (FA) equipment｜Wafer transfer robot (main unit)
SR8240
NIDEC INSTRUMENTS CORPORATION
Nidec Sankyo's industrial robots utilize our own servo motors and device cotrolling software to suppress vibration,to realize stable and fast handling under highly clean environment.
- characteristics:
- ・Adaptable to 300㎜2～3 ports・Compact size(Space-saving)・Flip-axis and universal hand available・Independent dual end effectors to pick 2 wafers simultaneously・The pitch can be synchronaized to FOUP movemebt to place 2 wafers simultaneously
- Contact information for product inquiry
- Contact Us
Product data
Basic information
| Degree of Freedom | 5-AXIS |
|---|---|
| Working range「Roll 1/2 AXIS」(deg) | -270～+450 |
| Working range「X AXIS」(㎜) | -432～+432 |
| Working range「Z AXIS」(㎜) | 300 |
| Working range「θ AXIS」(deg) | ±180 |
| Maximum speed「Roll 1/2 AXIS」(rad/sec) | 9.42 |
| Maximum speed「X AXIS」(㎜/s) | 1680 |
| Maximum speed「Z AXIS」(㎜/s) | 500 |
| Maximum speed「θ AXIS」(rad/s) | 8.72 |
| Maximum speed「Repeatability」(㎜) | +/-0.1 |
| Maximum speed「Manipulator weight」(kg) | 60 |
| Maximum speed「Controller」 | SC5000 |
| Handling Company | NIDEC SANKYO |
FAQ: Our Products
NIDEC INSTRUMENTS CORPORATION
inquiry by e-mail
Inquiry by phone
+81-3-5740-3000
