Mechanical equipment / Machine Tools｜Factory automation (FA) equipment｜Wafer transfer robot (main unit)
SR8241
NIDEC INSTRUMENTS CORPORATION
Nidec Sankyo's industrial robots utilize our own servo motors and device cotrolling software to suppress vibration,to realize stable and fast handling under highly clean environment.
- characteristics:
- ・High-Throughput Model・Dual End Effectos/Double Pick・Compact Size(Space-Saving)・End Effector's pitch 10㎜・Same Pitch as FOUP' Pitch to operate simultaneous 2 wafer・Lower Path Line・Flip-axis and Universal Hand available・FOUP access at most 5 FOUPs arrangement is capable without track axis by 3 link arms.
- Contact information for product inquiry
- Contact Us
Product data
Basic information
| Degree of Freadom | 5-AXIS |
|---|---|
| Working range「Roll 1/2 AXIS」(deg) | +/-275 |
| Working range「X AXIS」(㎜) | -750～+750 |
| Working range「Z AXIS」(㎜) | 470 |
| Working range「θ AXIS」(deg) | +/-170 |
| Maximum speed「Roll 1/2 AXIS」(rag/sec) | 9.42 |
| Maximum speed「X AXIS」(rag/sec) | 2.44(1952㎜/sec) |
| Maximum speed「Z AXIS」(㎜/sec) | 720 |
| Maximum speed「θ AXIS」(rag/sec) | 6.54 |
| Maximum speed「Maximum payload」(kg) | 2 |
| Maximum speed「Repeatability」(㎜) | +/-0.05 |
| Maximum speed「Mainpulator Weight」(kg) | 70 |
| Maximum speed「Controller」 | SC5000 |
| Handling Company | NIDEC SANKYO |
FAQ: Our Products
NIDEC INSTRUMENTS CORPORATION
inquiry by e-mail
Inquiry by phone
+81-3-5740-3000
