Mechanical equipment / Machine Tools｜Factory automation (FA) equipment｜Wafer transfer robot (main unit)
SR673 Series
NIDEC INSTRUMENTS CORPORATION
8 to 10.5 generation mother glass substrate transfer robot
- characteristics：
- Slider drive system. Achieves high-precision straightness.
- Contact information for product inquiry
- Contact Us
Product data
Basic information
| Degree of vacuum | 1.3×10-5 Pa or less |
|---|---|
| Operating range R axis | 4725mm |
| Operating Z axis | Within 1000mm |
| Operating θ axis | -185～+140° |
| Maximum speed R axis *1 | 3000mm/sec |
| Maximum Z axis *1 | 400mm/sec |
| Maximum speed θ axis *1 | 1.57rad/sec |
| Repeat position accuracy | ±0.25mm |
FAQ: Our Products
NIDEC INSTRUMENTS CORPORATION
inquiry by e-mail
Inquiry by phone
+81-3-5740-3000
