Mechanical equipment / Machine Tools｜Factory automation (FA) equipment｜Wafer transfer robot (main unit)
SR99S5 Series
NIDEC INSTRUMENTS CORPORATION
8.5 generation mother glass substrate transfer robot
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Product data
Basic information
| Operating range R axis | -2300～+2300mm |
|---|---|
| Operating range Z axis | Within 4700mm |
| Operating range θ axis | -185～+185° |
| Operating range Travel axis | Within 15700mm |
| Maximum speed R axis *1 | 1.92rad/sec |
| Maximum speed Z axis *1 | 1250mm/sec |
| Maximum speed θ axis *1 | 1.57rad/sec |
| Maximum speed Travel axis *1 | 2000mm/sec |
| Repeat position accuracy | ±0.025mm |
| Maximum payload accuracy | 65kg/1Arm(Including robot hand) |
FAQ: Our Products
NIDEC INSTRUMENTS CORPORATION
inquiry by e-mail
Inquiry by phone
+81-3-5740-3000
