Mechanical equipment / Machine Tools|Factory automation (FA) equipment|Wafer transfer robot (main unit)
SR9581 Series
NIDEC INSTRUMENTS CORPORATION
10.5 generation mother glass substrate transfer robot
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Product data
Basic information
Operating range R axis | -2925 ~ +2575mm |
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Operating range Z axis | Within 6200 mm |
Operating range θ axis | -140 ~ +185° |
Operating range Travel axis | Within 16500 mm |
Maximum speed R axis *1 | 1.86 rad / sec |
Maximum speed Z axis *1 | 1300 mm / sec |
Maximum speed θ axis *1 | 1.05 rad / sec |
Maximum speed Travel axis *1 | Winthin 2000 mm / sec |
Repeat position accuracy | ±0.025 mm |
Maximum payload accuracy | 150 kg / 1Arrm (lncluding robot hand) |
Contact information
NIDEC INSTRUMENTS CORPORATION
inquiry by e-mail
Inquiry by phone
+81-3-5740-3000