Mechanical equipment / Machine Tools|Factory automation (FA) equipment|Wafer transfer robot (main unit)

SR9581 Series

NIDEC INSTRUMENTS CORPORATION

10.5 generation mother glass substrate transfer robot

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Product data

Basic information

Operating range R axis -2925 ~ +2575mm
Operating range Z axis Within 6200 mm
Operating range θ axis -140 ~ +185°
Operating range Travel axis Within 16500 mm
Maximum speed R axis *1 1.86 rad / sec
Maximum speed Z axis *1 1300 mm / sec
Maximum speed θ axis *1 1.05 rad / sec
Maximum speed Travel axis *1 Winthin 2000 mm / sec
Repeat position accuracy ±0.025 mm
Maximum payload accuracy 150 kg / 1Arrm (lncluding robot hand)
*1 : Representative value

Contact information

NIDEC INSTRUMENTS CORPORATION

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Inquiry by phone

+81-3-5740-3000

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