Mechanical equipment / Machine Tools|Factory automation (FA) equipment|Wafer transfer robot (main unit)

SR99S5 Series

NIDEC INSTRUMENTS CORPORATION

8.5 generation mother glass substrate transfer robot

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Product data

Basic information

Operating range R axis -2300~+2300mm
Operating range Z axis Within 4700mm
Operating range θ axis -185~+185°
Operating range Travel axis Within 15700mm
Maximum speed R axis *1 1.92rad/sec
Maximum speed Z axis *1 1250mm/sec
Maximum speed θ axis *1 1.57rad/sec
Maximum speed Travel axis *1 2000mm/sec
Repeat position accuracy ±0.025mm
Maximum payload accuracy 65kg/1Arm(Including robot hand)
*1:Representative value

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NIDEC INSTRUMENTS CORPORATION

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+81-3-5740-3000

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