Mechanical equipment / Machine Tools|Factory automation (FA) equipment|Wafer transfer robot (main unit)
SR99S5 Series
NIDEC INSTRUMENTS CORPORATION
8.5 generation mother glass substrate transfer robot
- Contact information for product inquiry
- Contact Us
Product data
Basic information
Operating range R axis | -2300~+2300mm |
---|---|
Operating range Z axis | Within 4700mm |
Operating range θ axis | -185~+185° |
Operating range Travel axis | Within 15700mm |
Maximum speed R axis *1 | 1.92rad/sec |
Maximum speed Z axis *1 | 1250mm/sec |
Maximum speed θ axis *1 | 1.57rad/sec |
Maximum speed Travel axis *1 | 2000mm/sec |
Repeat position accuracy | ±0.025mm |
Maximum payload accuracy | 65kg/1Arm(Including robot hand) |
FAQ: Our Products
NIDEC INSTRUMENTS CORPORATION
inquiry by e-mail
Inquiry by phone
+81-3-5740-3000