Mechanical equipment / Machine Tools|Factory automation (FA) equipment|Wafer transfer robot (main unit)

SR8653 Series

NIDEC INSTRUMENTS CORPORATION

8.5 generation mother glass substrate transfer robot

characteristics:
Slider drive system. Achieves high-precision straightness.
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Product data

Basic information

Degree of vacuum 1.3×10-5 Pa or less
Operating range R axis 3620mm
Operating range Z axis Within 820mm
Operating range θ axis -185~+140°
Maximum speed R axis *1 2700mm/sec
Maximum speed Z axis *1 500mm/sec
Maximum speed θ axis *1 2.1rad/sec
Repeat position accuracy ±0.25mm
Maximum payload accuracy 190kg/1Arm(Including robot hand)
*1:Representative value

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NIDEC INSTRUMENTS CORPORATION

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+81-3-5740-3000

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