Mechanical equipment / Machine Tools｜Factory automation (FA) equipment｜Wafer transfer robot (main unit)
SR8220
NIDEC INSTRUMENTS CORPORATION
Our industrial robotsutilize our own servo motors anddevice cotrolling software to suppress vibration,to realize stableand fast handling under highly cleanenvironment.
- characteristics:
- ・Dual arm version insure max.throughput・High-speed replacement of a wafer and a double pick are possible.・Excellent straight line accuracy・It can combine a variation of a Z axis height with suitable for a various equipments・Compatible to handle 2 to 8 inch wafers, also capable to use 12 inch
- Contact information for product inquiry
- Contact Us
Product data
Basic information
| Arm type | Short/Standard/Long |
|---|---|
| Degree of Freedom | 4-AXIS |
| Working range「R1/R2 AXIS」(㎜) | Short：-265+～245/Standard：-212～+321/Long：-319～447 |
| Working range「Z AXIS」(㎜) | 300/400/450/600 |
| Working range「θ AXIS」(deg) | 340 |
| Maximum speed「R1/R2 AXIS」(rad/sec) | 5.76 |
| Maximum speed「Z AXIS」(㎜/sec) | 450 |
| Maximum speed「θ AXIS」(rad/sec) | 6.97 |
| Maximum speed「Maximum payload」(kg) | 2 |
| Maximum speed「Repeatability」(㎜) | +/-0.1 |
| Maximum speed「Manipulator weight」 | 60/70/85 |
| Maximum speed「Controller」 | SC5000 |
| Handling Company | NIDEC INSTRUMENTS |
FAQ: Our Products
NIDEC INSTRUMENTS CORPORATION
inquiry by e-mail
Inquiry by phone
+81-3-5740-3000
