Mechanical equipment / Machine Tools|Factory automation (FA) equipment|Wafer transfer robot (main unit)

SR8651 Series

NIDEC INSTRUMENTS CORPORATION

4.5 to 6 generation mother glass substrate transfer robot

characteristics:
Arm drive system. Realization of minimum turning radius
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Product data

Basic information

Degree of vacuum 1.3×10-5 Pa or less
Operating range R axis -565~+565mm
Operating Z axis Within 820mm
Operating range θ axis -185~+140°
Maximum speed R axis *1 1.22rad/sec
Maximum speed Z axis *1 350mm/sec
Maximum speed θ axis *1 2.09rad/sec
Repeat position accuracy ±0.2mm
Maximum payload accuracy 65kg/1Arm(Including robot hand)
*1:Representative value

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NIDEC INSTRUMENTS CORPORATION

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Inquiry by phone

+81-3-5740-3000

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