Mechanical equipment / Machine Tools｜Factory automation (FA) equipment｜Wafer transfer robot (main unit)
SR9183 Series
NIDEC INSTRUMENTS CORPORATION
4.5 generation mother glass substrate transfer robot
- characteristics：
- ・FO-PLP compatible model ・For EFEM (compatible with multi-stage equipment)
- Contact information for product inquiry
- Contact Us
Product data
Basic information
| Operating range R axis | -1190～+1190mm |
|---|---|
| Operating range Z axis | Within 2400mm |
| Operating range θ axis | -140～+185° |
| Operating range Travel axis | Within 11700mm |
| Maximum speed R axis *1 | 3.32rad/sec |
| Maximum speed Z axis *1 | 900mm/sec |
| Maximum speed θ axis *1 | 2.4rad/sec |
| Maximum speed Travel axis *1 | 3000mm/sec |
| Repeat position accuracy | ±0.2mm |
| Maximum payload accuracy | 15kg/1Arm(Including robot hand) |
FAQ: Our Products
NIDEC INSTRUMENTS CORPORATION
inquiry by e-mail
Inquiry by phone
+81-3-5740-3000
