Mechanical equipment / Machine Tools|Factory automation (FA) equipment|Wafer transfer robot (main unit)

SR9183 Series

NIDEC INSTRUMENTS CORPORATION

4.5 generation mother glass substrate transfer robot

characteristics:
・FO-PLP compatible model ・For EFEM (compatible with multi-stage equipment)
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Product data

Basic information

Operating range R axis -1190~+1190mm
Operating range Z axis Within 2400mm
Operating range θ axis -140~+185°
Operating range Travel axis Within 11700mm
Maximum speed R axis *1 3.32rad/sec
Maximum speed Z axis *1 900mm/sec
Maximum speed θ axis *1 2.4rad/sec
Maximum speed Travel axis *1 3000mm/sec
Repeat position accuracy ±0.2mm
Maximum payload accuracy 15kg/1Arm(Including robot hand)
*1:Representative value

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NIDEC INSTRUMENTS CORPORATION

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+81-3-5740-3000

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