Mechanical equipment / Machine Tools｜Factory automation (FA) equipment｜Wafer transfer robot (main unit)
SR9581 Series
NIDEC INSTRUMENTS CORPORATION
10.5 generation mother glass substrate transfer robot
- Contact information for product inquiry
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Product data
Basic information
| Operating range R axis | -2925 ～ +2575mm |
|---|---|
| Operating range Z axis | Within 6200 mm |
| Operating range θ axis | -140 ～ +185° |
| Operating range Travel axis | Within 16500 mm |
| Maximum speed R axis *1 | 1.86 rad / sec |
| Maximum speed Z axis *1 | 1300 mm / sec |
| Maximum speed θ axis *1 | 1.05 rad / sec |
| Maximum speed Travel axis *1 | Winthin 2000 mm / sec |
| Repeat position accuracy | ±0.025 mm |
| Maximum payload accuracy | 150 kg / 1Arrm (lncluding robot hand) |
Contact information
NIDEC INSTRUMENTS CORPORATION
inquiry by e-mail
Inquiry by phone
+81-3-5740-3000
