Mechanical equipment / Machine Tools|Factory automation (FA) equipment|Wafer transfer robot (main unit)

SR99L1 Series

NIDEC INSTRUMENTS CORPORATION

6 generation mother glass substrate transfer robot

Contact information for product inquiry
Contact Us

Product data

Basic information

Operating range R axis -1700~+1680mm
Operating range Z axis Within 4700mm
Operating range θ axis -185~+185°
Operating range Travel axis Within 14700mm
Maximum speed R axis *1 2.18rad/sec
maximum speed Z axis *1 1500mm/sec
Maximum speed θ axis *1 1.57rad/sec
Maximum speed Travel axis *1 2000mm/sec
Repeat position accuracy ±0.2mm
Maximum payload accuracy 50kg/1Arm(Including robot hand)
*1:Representative value

FAQ: Our Products

NIDEC INSTRUMENTS CORPORATION

inquiry by e-mail

Inquiry by phone

+81-3-5740-3000

Contact information for product inquiry

Contact Us

NIDEC Group Search