Semiconductor Package Inspection System
GATS®-7861
Company：NIDEC ADVANCE TECHNOLOGY CORPORATION
High speed shuttle, step and repeat style, Open/Leak automatic substrate inspection system
・Double side Auto Alignment
・Comprehensive alignment accuracy ±5.0μm
・Twin-table
・Upper & Lower shuttle style
・Inspection by step & repeat for each pieces.
・Available to embedded IC components test (Option)